“3 in 1” ワイドレンジ真空センサー
NOVION
NOVION®は「3 in 1」のワイドレンジ真空センサーです。
ATMからUHVまでの全圧測定、ヘリウムの検出、質量数1から300までの残留ガス分析が可能です。
全ての機能を1台に
- イオントラップ、TOF、熱電対形式を用いた各種計測
-
ベーキング温度：
摂氏 80℃（コントロールユニット付きの場合）
摂氏 200℃（コントロールユニット取外し時）
TechnicalData
| Principle of measurement | ■ Ion Trapping and electron impact ionization ■ Time of flight mass spectrometry ■ Heat conduction (Pirani) |
|---|---|
| Vacuum connection | KF 25/CF40 |
| Scope of delivery | ■ Sensor ■ Removable control unit ■ RJ45 data cable with USB-to-RS232 adapter ■ 24 V power supply |
| Filaments | 2x Iridium, yttria coated |
| Materials in vacuum | SS, Au, Y2O3 on Ir, glass, Cu, Pt, Al2O3 |
| Mounting position | ■ Any for < 10 mbar ■ Position-dependent for > 10 mbar |
| Operating temperature | 10 °C to 55 °C |
| Max. Bakeout temperature | 80 °C at flansch (attached control unit) 200 °C at sensor (detached control unit) |
| Weight | ■ Sensor head: about 1 kg (flange dependent) ■ Control unit: about 0.76 kg |
| Dimensions (H x W x D) | ■ 260 × 73 × 66 mm (attached control unit) ■ 100 × 73 × 66 mm (without control unit) |
PRESSURE
- ATM から UHV の広範囲な真空度計測
- RGA や He リークテストと同時使用可能
Pressure Measurement
| Short description | Convenient pressure measurement range reaches from 1000 mbar down to UHV. Switching between Pirani and ionization mode is performed automatically at 1･10-3 mbar and vice versa at 5･10-3 mbar. Pressure monitoring is carried out simultaneously to the optional residual gas analysis or helium leakage detection. |
|---|---|
| Measurement range (pressure) | 1・10-9 to 1・105 Pa 1・10-11 to 1,000 mbar 7.5・10-12 to 750 Torr |
| Accuracy (pressure) | ± 25 % (1・10-3 to 1・10+1 mbar) ± 15 % (1・10-7 to 1・10-5 mbar) |
| Reproducibllity (pressure) | ± 10 % of reading (1・10-8 to 1・10-2 mbar) |
| Sampling rate | Adjustable |
LEAK
- 追加部品なしでのヘリウムリーク検査
Helium Leak Detection
| Short description | Easy and sensitive Helium leakage detection is available without additional instrumentation. A high dynamic range is provided, even at high pressures up to 5・10-3 mbar. |
|---|---|
| Minimum detectable partial pressure of Helium (precentage of the total pressure p) |
■ < 0.05 % (p = 1・10-3 to 1・10-6 mbar) ■ < 0.5 % (p = 1・10-7 mbar) ■ < 1 % (p = 1・10-8 mbar) ■ < 10 % (p = 1・10-10 mbar) |
| Minimum detectable Helium leakage rate for SHe = 10l/s |
■ < 5・10-6 to 5・10-9 mbar/l*s (p = 1・10-3 to 1・10-6 mbar) ■ < 5・10-9 mbar/l*s (p = 1・10-7 mbar) ■ < 1・10-9 mbar/l*s (p = 1・10-8 mbar) ■ < 1・10-10 mbar/l*s (p = 1・10-10 mbar) |
RGA
- 最大で 5・10-3 mbar でのガス分析
- 各組成の検知：H2, H2O, N2, O2, CO2 etc.
- マススペクトラムを 250 msec で実行
- 水素とヘリウムを分離計測
- 重炭化水素検知
Residual Gas Analysis
| Short description | A rough residual gas analysis from 1 to 300 amu can be carried out. Spectral information is available up to a total pressure of 5・10-3 mbar. The resolution is optimized for three typical use cases: ■ Measurement of Hydrogen and Helium with a very hign resolution (1 to 5 amu). ■ Typical atmospheric gas component and water can be separated (10 to 300 amu). ■ Measurement of the overall contamination by heavy carbon hydrogens (50 to 300 amu). |
|---|---|
| Mass range | 1 to 300 amu |
| Mass-resolution R (note that a small r is better) |
■ < 1 (for 1 to 5 amu) ■ < 10 (for 10 to 50 amu) ■ < 20 (for 51 to 100 amu) ■ < 50 (for 101 to 300 amu) |
| Minimum detectable partial pressure up to 40 amu (precentage of the total pressure p) |
About 0.1 % (depending on total pressure) |
| Minimum detectable partial pressure of heavy hydrocarbons (precentage of the total pressure p) |
About 0.1 % (depending on total pressure) |
技術資料
データシート
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