“3 in 1” ワイドレンジ真空センサー
NOVION

NOVION®は「3 in 1」のワイドレンジ真空センサーです。
ATMからUHVまでの全圧測定、ヘリウムの検出、質量数1から300までの残留ガス分析が可能です。

全ての機能を1台に

  • イオントラップ、TOF、熱電対形式を用いた各種計測
  • ベーキング温度:
    摂氏 80℃(コントロールユニット付きの場合)
    摂氏 200℃(コントロールユニット取外し時)
全ての機能を1台に

TechnicalData

Principle of measurement ■ Ion Trapping and electron impact ionization
■ Time of flight mass spectrometry
■ Heat conduction (Pirani)
Vacuum connection KF 25/CF40
Scope of delivery ■ Sensor
■ Removable control unit
■ RJ45 data cable with USB-to-RS232 adapter
■ 24 V power supply
Filaments 2x Iridium, yttria coated
Materials in vacuum SS, Au, Y2O3 on Ir, glass, Cu, Pt, Al2O3
Mounting position ■ Any for < 10 mbar
■ Position-dependent for > 10 mbar
Operating temperature 10 °C to 55 °C
Max. Bakeout temperature 80 °C at flansch (attached control unit)
200 °C at sensor (detached control unit)
Weight ■ Sensor head: about 1 kg (flange dependent)
■ Control unit: about 0.76 kg
Dimensions (H x W x D) ■ 260 × 73 × 66 mm (attached control unit)
■ 100 × 73 × 66 mm (without control unit)

PRESSURE

  • ATM から UHV の広範囲な真空度計測
  • RGA や He リークテストと同時使用可能

Pressure Measurement

Short description Convenient pressure measurement range reaches from 1000 mbar down to UHV.

Switching between Pirani and ionization mode is performed automatically at
1・10-3 mbar and vice versa at 5・10-3 mbar.

Pressure monitoring is carried out simultaneously to the optional residual gas
analysis or helium leakage detection.
Measurement range (pressure) 1・10-9 to 1・105 Pa
1・10-11 to 1,000 mbar
7.5・10-12 to 750 Torr
Accuracy (pressure) ± 25 % (1・10-3 to 1・10+1 mbar)
± 15 % (1・10-7 to 1・10-5 mbar)
Reproducibllity (pressure) ± 10 % of reading (1・10-8 to 1・10-2 mbar)
Sampling rate Adjustable

LEAK

  • 追加部品なしでのヘリウムリーク検査

Helium Leak Detection

Short description Easy and sensitive Helium leakage detection is available without additional instrumentation.

A high dynamic range is provided, even at high pressures up to 5・10-3 mbar.
Minimum detectable partial
pressure of Helium
(precentage of the total pressure p)
■ < 0.05 % (p = 1・10-3 to 1・10-6 mbar)
■ < 0.5 % (p = 1・10-7 mbar)
■ < 1 % (p = 1・10-8 mbar)
■ < 10 % (p = 1・10-10 mbar)
Minimum detectable Helium
leakage rate for SHe = 10l/s
■ < 5・10-6 to 5・10-9 mbar/l*s (p = 1・10-3 to 1・10-6 mbar)
■ < 5・10-9 mbar/l*s (p = 1・10-7 mbar)
■ < 1・10-9 mbar/l*s (p = 1・10-8 mbar)
■ < 1・10-10 mbar/l*s (p = 1・10-10 mbar)

RGA

  • 最大で 5・10-3 mbar でのガス分析
  • 各組成の検知:H2, H2O, N2, O2, CO2 etc.
  • マススペクトラムを 250 msec で実行
  • 水素とヘリウムを分離計測
  • 重炭化水素検知

Residual Gas Analysis

Short description A rough residual gas analysis from 1 to 300 amu can be carried out.

Spectral information is available up to a total pressure of 5・10-3 mbar.

The resolution is optimized for three typical use cases:

■ Measurement of Hydrogen and Helium with a very hign resolution (1 to 5 amu).
■ Typical atmospheric gas component and water can be separated (10 to 300 amu).
■ Measurement of the overall contamination by heavy carbon hydrogens (50 to 300 amu).
Mass range 1 to 300 amu
Mass-resolution R
(note that a small r is better)
■ < 1 (for 1 to 5 amu)
■ < 10 (for 10 to 50 amu)
■ < 20 (for 51 to 100 amu)
■ < 50 (for 101 to 300 amu)
Minimum detectable partial
pressure up to 40 amu
(precentage of the total pressure p)
About 0.1 % (depending on total pressure)
Minimum detectable partial
pressure of heavy hydrocarbons
(precentage of the total pressure p)
About 0.1 % (depending on total pressure)

技術資料

データシート


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